JPH01129672U - - Google Patents
Info
- Publication number
- JPH01129672U JPH01129672U JP2065788U JP2065788U JPH01129672U JP H01129672 U JPH01129672 U JP H01129672U JP 2065788 U JP2065788 U JP 2065788U JP 2065788 U JP2065788 U JP 2065788U JP H01129672 U JPH01129672 U JP H01129672U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- plate
- probe plate
- mounting table
- movement mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 12
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988020657U JPH0512776Y2 (en]) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988020657U JPH0512776Y2 (en]) | 1988-02-19 | 1988-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129672U true JPH01129672U (en]) | 1989-09-04 |
| JPH0512776Y2 JPH0512776Y2 (en]) | 1993-04-02 |
Family
ID=31237211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988020657U Expired - Lifetime JPH0512776Y2 (en]) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512776Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147245A (ja) * | 2004-11-17 | 2006-06-08 | Jeol Ltd | プローブ装置及びそれを備えた試料検査装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57205073U (en]) * | 1981-06-25 | 1982-12-27 | ||
| JPS6053067U (ja) * | 1983-09-20 | 1985-04-13 | 株式会社富士通ゼネラル | 回路基板の検査装置 |
-
1988
- 1988-02-19 JP JP1988020657U patent/JPH0512776Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57205073U (en]) * | 1981-06-25 | 1982-12-27 | ||
| JPS6053067U (ja) * | 1983-09-20 | 1985-04-13 | 株式会社富士通ゼネラル | 回路基板の検査装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147245A (ja) * | 2004-11-17 | 2006-06-08 | Jeol Ltd | プローブ装置及びそれを備えた試料検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512776Y2 (en]) | 1993-04-02 |